Dhidik Prastiyanto, FT Pendidikan Teknik Elektro and Andi Suhono, - and Anis Fikri Azhari, - and Sugeng Purbawanto, - and Ulfah Mediati Arief, - (2018) Fuzzy-PID System Control for Tungsten Filament Heater of Thermal Vacuum Evaporation. In: The 7th Engineering International Conference (EIC), Engineering International Conference on Education, Concept and Application on Green Technology.

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Abstract

Vacuum coating is a solid material deposition technology that uses vacuum combustion using tungsten filaments. The quality of material deposition depends on the heat distributed by the tungsten filament to the material to be deposited. In this work, PID and Fuzzy-PID controller to control the heat of tungsten filament is simulated. The Tungsten model is represented with transfer function in s-domain. Optimization of Fuzzy�PID controller is done to obtain optimal heat of tungsten filament. Step and ramp responses of PID and PID�Fuzzy controlled system were investigated. The result shows that the Fuzzy-PID reach faster steady state compare to t

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