Modelling of Rotational Speed of a Digital Spin Coater Using Multi-Level Periodic Perturbation Signal

Sutikno, Sutikno Modelling of Rotational Speed of a Digital Spin Coater Using Multi-Level Periodic Perturbation Signal. Journal Europeen des Systemes Automatises. ISSN 12696935

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Item Type:	Article
Subjects:	UNSPECIFIED
Fakultas:	UNSPECIFIED
Depositing User:	iwan kepeg unnes
Date Deposited:	28 Jun 2023 05:27
Last Modified:	28 Jun 2023 05:40
URI:	http://lib.unnes.ac.id/id/eprint/59239

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