Sugianto, FMIPA Fisika (2015) Structure evolution of zinc oxide thin films deposited by unbalance DC magnetron sputtering. In: International Symposium on Current Progress in Mathematics and Sciences 2015 (ISCPMS 2015).

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Abstract

Zinc oxide (ZnO) thin films are deposited on corning glass substrates using unbalanced DC magnetron sputtering. The effect of growth temperature on surface morphology and crystallographic orientation of ZnO thin film is studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The surface morphology and crystallographic orientation of ZnO thin film are transformed against the increasing of growth temperature. The mean grain size of film and the surface roughness are inversely and directly proportional towards the growth temperature from room temperature to 300 οC, respectively. The smaller grain size and finer roughness of ZnO thin film are obtained at growth temperature of 400 οC. The result of AFM analysis is in good agreement with the result of XRD analysis. ZnO thin films deposited in a series of growth temperatures have hexagonal wurtzite polycrystalline structures and they exhibit transformations in the crystallographic orientation. The results in this study reveal that the growth temperature strongly influences the surface morphology and crystallographic orientation of ZnO thin film.

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