Nur Hamid, - and Budi Astuti, - and Ngurah Made Dharma Putra, - and Putut Marwoto, - and Sugianto, FMIPA Fisika and Rodhotul Muttaqin, - and Natalia Erna Setyaningsih, - (2020) Effect of Spinning Rate on Structure and Morphology of ZnO:Cu Thin Films Prepared using a Sol-gel Spin Coating Method. International Journal of Research Innovation and Entrepreneurship, 1 (1).

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Abstract

Cu-doped ZnO (ZnO:Cu) thin film was deposited on glass substrate using a sol-gel spin coating method. The film was prepared at various spinning rate followed by sintering at 250 °C for 10 min and annealing at 350 °C for 2 hours. The effect of spinning rate on structural properties was investigated by means of X-ray diffractometer (XRD), scanning electron microscope (SEM) equipped with energy dispersive X�ray (EDX). The diffraction pattern indicated that Cu-ZnO thin films showed a strong c-axis orientation, i.e. the peak attributed to (002) plane at a 2

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